검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Behavior of molybdenum in silicon evaluated for integrated circuit processing Benton JL, Jacobson DC, Jackson B, Johnson JA, Boone T, Eaglesham DJ, Stevie FA, Becerro J Journal of the Electrochemical Society, 146(5), 1929, 1999 |
| 2 |
On the Mechanism of the Hydrogen-Induced Exfoliation of Silicon Weldon MK, Marsico VE, Chabal YJ, Agarwal A, Eaglesham DJ, Sapjeta J, Brown WL, Jacobson DC, Caudano Y, Christman SB, Chaban EE Journal of Vacuum Science & Technology B, 15(4), 1065, 1997 |
| 3 |
The Mechanisms of Iron Gettering in Silicon by Boron Ion-Implantation Benton JL, Stolk PA, Eaglesham DJ, Jacobson DC, Cheng JY, Poate JM, Myers SM, Haynes TE Journal of the Electrochemical Society, 143(4), 1406, 1996 |
| 4 |
Particle-Particle Interaction Effects in Image Projection Lithography Systems Berger SD, Eaglesham DJ, Farrow RC, Freeman RR, Kraus JS, Liddle JA Journal of Vacuum Science & Technology B, 11(6), 2294, 1993 |