검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Postchemical-Mechanical Planarization Cleanup Process for Interlayer Dielectric Films Roy SR, Ali I, Shinn G, Furusawa N, Shah R, Peterman S, Witt K, Eastman S, Kumar P Journal of the Electrochemical Society, 142(1), 216, 1995 |