화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Metallization schemes for radio frequency microelectfornechanical system switches
Leedy KD, Cortez R, Ebel JL, Strawser RE, Walker AP, DeSalvo GC, Young RM
Journal of Vacuum Science & Technology A, 21(4), 1172, 2003
2 Wet Chemical Digital Etching of GaAs at Room-Temperature
Desalvo GC, Bozada CA, Ebel JL, Look DC, Barrette JP, Cerny CL, Dettmer RW, Gillespie JK, Havasy CK, Jenkins TJ, Nakano K, Pettiford CI, Quach TK, Sewell JS, Via GD
Journal of the Electrochemical Society, 143(11), 3652, 1996