| 1 |
Particle-in-cell simulation of electron and ion energy distributions in dc/rf hybrid capacitively-coupled plasmas
Diomede P, Kim D, Economou DJ
AIChE Journal, 59(9), 3214, 2013 |
| 2 |
Measurement of electron temperatures and electron energy distribution functions in dual frequency capacitively coupled CF4/O-2 plasmas using trace rare gases optical emission spectroscopy
Chen ZY, Donnelly VM, Economou DJ, Chen L, Funk M, Sundararajan R
Journal of Vacuum Science & Technology A, 27(5), 1159, 2009 |
| 3 |
Fundamentals and applications of ion-ion plasmas
Economou DJ
Applied Surface Science, 253(16), 6672, 2007 |
| 4 |
Effect of surface roughness of the neutralization grid on the energy and flux of fast neutrals and residual ions extracted from a neutral beam source
Ranjan A, Helmbrecht C, Donnelly VM, Economou DJ, Franz GF
Journal of Vacuum Science & Technology B, 25(1), 258, 2007 |
| 5 |
Proceedings of the international symposium on dry process - DPS 2005
Fujiwara N, Stamate E, Yeom GY, Shiratani M, Chang HY, Economou DJ, Kusano E, Chang JP
Thin Solid Films, 515(12), 4843, 2007 |
| 6 |
Energy distribution and flux of fast neutrals and residual ions extracted from a neutral beam source
Ranjan A, Donnelly VM, Economou DJ
Journal of Vacuum Science & Technology A, 24(5), 1839, 2006 |
| 7 |
Experimental and theoretical study of ion distributions near 300 mu m tall steps on rf-biased wafers in high density plasmas
Woodworth JR, Miller PA, Shul RJ, Abraham IC, Aragon BP, Hamilton TW, Willison CG, Kim D, Economou DJ
Journal of Vacuum Science & Technology A, 21(1), 147, 2003 |
| 8 |
Plasma molding over deep trenches and the resulting ion and energetic neutral distributions
Kim D, Economou DJ
Journal of Vacuum Science & Technology B, 21(4), 1248, 2003 |
| 9 |
Two-dimensional pulsed-plasma simulation of a chlorine discharge
Ramamurthi B, Economou DJ
Journal of Vacuum Science & Technology A, 20(2), 467, 2002 |
| 10 |
Anisotropic etching of polymer films by high energy (similar to 100s of eV) oxygen atom neutral beams
Panda S, Economou DJ, Chen L
Journal of Vacuum Science & Technology A, 19(2), 398, 2001 |
