검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Time-resolved measurements of the E-to-H mode transition in electronegative pulse-modulated inductively coupled plasmas Edamura M, Benck EC, Wang YC Journal of Vacuum Science & Technology A, 24(6), 2151, 2006 |
| 2 |
High-temperature electrostatic chuck for nonvolatile materials dry etch Kanno S, Edamura M, Yoshioka K, Nishio R, Kanai S, Kihara H, Shimada T Journal of Vacuum Science & Technology B, 23(1), 113, 2005 |
| 3 |
Effects of voltage distribution along an induction coil and discharge frequency in inductively coupled plasmas Edamura M, Benck EC Journal of Vacuum Science & Technology A, 22(2), 293, 2004 |
| 4 |
Transition from E to H mode discharge in pulse-modulated inductively coupled plasmas Edamura M, Benck EC Journal of Vacuum Science & Technology A, 21(2), 470, 2003 |