검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Surface phenomena related to mirror degradation in extreme ultraviolet (EUV) lithography Madey TE, Faradzhev NS, Yakshinskiy BV, Edwards NV Applied Surface Science, 253(4), 1691, 2006 |
| 2 |
Impact of deposition and annealing temperature on material and electrical characteristics of ALD HfO2 Triyoso D, Liu R, Roan D, Ramon M, Edwards NV, Gregory R, Werho D, Kulik J, Tam G, Irwin E, Wang XD, La LB, Hobbs C, Garcia R, Baker J, White BE, Tobin P Journal of the Electrochemical Society, 151(10), F220, 2004 |
| 3 |
HfO2 gate dielectrics deposited via tetrakis diethylamido hafnium Schaeffer J, Edwards NV, Liu R, Roan D, Hradsky B, Gregory R, Kulik J, Duda E, Contreras L, Christiansen J, Zollner S, Tobin P, Nguyen BY, Nieh R, Ramon M, Rao R, Hegde R, Rai R, Baker J, Voight S Journal of the Electrochemical Society, 150(4), F67, 2003 |
| 4 |
Real-time assessment of overlayer removal on 4H-SiC surfaces: Techniques and relevance to contact formation Edwards NV, Madsen LD, Robbie K, Powell GD, Jarrendahl K, Cobet C, Esser N, Richter W, Aspnes DE Materials Science Forum, 338-3, 1033, 2000 |
| 5 |
Optical characterization of wide bandgap semiconductors Edwards NV, Bremser MD, Batchelor AD, Buyanova IA, Madsen LD, Yoo SD, Welhkamp T, Wilmers K, Cobet C, Esser N, Davis RF, Aspnes DE, Monemar B Thin Solid Films, 364(1-2), 98, 2000 |
| 6 |
Optical properties of SiC investigated by spectroscopic ellipsometry from 3.5 to 10 eV Cobet C, Wilmers K, Wethkamp T, Edwards NV, Esser N, Richter W Thin Solid Films, 364(1-2), 111, 2000 |
| 7 |
Analysis of optical spectra by Fourier methods Yoo SD, Edwards NV, Aspnes DE Thin Solid Films, 313-314, 143, 1998 |
| 8 |
Spectroscopic ellipsometry and low-temperature reflectance : complementary analysis of GaN thin films Edwards NV, Yoo SD, Bremser MD, Horton MN, Perkins NR, Weeks TW, Liu H, Stall RA, Kuech TF, Davis RF, Aspnes DE Thin Solid Films, 313-314, 187, 1998 |