검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of low-k dielectric trench surface cleaning after a fluorocarbon etch Tan YS, Chooi SYM, Sin CY, Ee PY, Srinivasan MP, Pehkonen SO Thin Solid Films, 462-63, 250, 2004 |
| No. | Article |
|---|---|
| 1 |
Characterization of low-k dielectric trench surface cleaning after a fluorocarbon etch Tan YS, Chooi SYM, Sin CY, Ee PY, Srinivasan MP, Pehkonen SO Thin Solid Films, 462-63, 250, 2004 |