검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Structure of surface reaction layer of poly-Si etched by fluorocarbon plasma Kurihara K, Egami A, Nakamura M Journal of Vacuum Science & Technology A, 24(2), 286, 2006 |
| 2 |
Measurement of desorbed products during organic polymer thin film etching by plasma beam irradiation Kurihara K, Karahashi K, Egami A, Nakamura M Journal of Vacuum Science & Technology A, 24(6), 2217, 2006 |
| 3 |
Gap-filling property of Cu film by chemical vapor deposition Kobayashi A, Sekiguchi A, Koide T, Okada O, Zhang M, Egami A, Sunayama H Journal of Vacuum Science & Technology B, 17(5), 2256, 1999 |