검색결과 : 1건
No. | Article |
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1 |
Cold-Walled UHV/CVD Batch Reactor for the Growth of Si1-xGex Layers Thomsen EV, Christensen C, Andersen CR, Pedersen EV, Eginton PN, Hansen O, Petersen JW Thin Solid Films, 294(1-2), 72, 1997 |
No. | Article |
---|---|
1 |
Cold-Walled UHV/CVD Batch Reactor for the Growth of Si1-xGex Layers Thomsen EV, Christensen C, Andersen CR, Pedersen EV, Eginton PN, Hansen O, Petersen JW Thin Solid Films, 294(1-2), 72, 1997 |