검색결과 : 1건
No. | Article |
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1 |
Optimization of in situ substrate surface treatment in a cathodic arc plasma: A study by TEM and plasma diagnostics Schonjahn C, Ehlasarian AP, Lewis DB, New R, Munz WD, Twesten RD, Petrov I Journal of Vacuum Science & Technology A, 19(4), 1415, 2001 |