검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices Birkholz M, Ehwald KE, Kulse P, Drews J, Frohlich M, Haak U, Kaynak M, Matthus E, Schulz K, Wolansky D Advanced Functional Materials, 21(9), 1652, 2011 |
| 2 |
Circuit applications of high-performance SiGe : C HBTs integrated in BiCMOS technology Winkler W, Borngraber J, Heinemann B, Rucker H, Barth R, Bauer J, Bolze D, Drews J, Ehwald KE, Grabolla T, Haak U, Hoppner W, Knoll D, Kruger D, Kuck B, Kurps R, Marschmeyer M, Richter H, Schley P, Schmidt D, Scholz R, Tillack B, Wolansky D, Wulf HE, Yamamoto Y, Zaumseil P Applied Surface Science, 224(1-4), 297, 2004 |
| 3 |
Comparison of SiGe and SiGe : C heterojunction bipolar transistors Knoll D, Heinemann B, Ehwald KE, Tillack B, Schley P, Osten HJ Thin Solid Films, 369(1-2), 342, 2000 |