화학공학소재연구정보센터
검색결과 : 38건
No. Article
1 Deposition of micro crystalline silicon films using microwave plasma enhanced chemical vapor deposition
Altmannshofer S, Miller B, Holleitner AW, Boudaden J, Eisele I, Kutter C
Thin Solid Films, 645, 180, 2018
2 Growth of highly textured aluminum films on LiTaO3 with optimized titanium intermediate layers
Nussl R, Senft C, Beckmeier D, Jewula T, Ruile W, Sulima T, Hansch W, Eisele I
Thin Solid Films, 519(22), 8154, 2011
3 Effect of aging and temperature on alternating current conductivity of tellurium thin films
Tsiulyanu D, Marian T, Tiuleanu A, Liess HD, Eisele I
Thin Solid Films, 517(8), 2820, 2009
4 Growth and modification of thin a-Si : H/a-Ge : H bi-layers to sacrificial c-SiGe alloys through ArF-Excimer laser assisted processing
Chiussi S, Gontad F, Rodriguez R, Serra C, Serra J, Leon B, Sulima T, Hollt L, Eisele I
Applied Surface Science, 254(19), 6030, 2008
5 Epitaxy - A way to novel field effect devices
Sulima T, Abelein U, Eisele I
Thin Solid Films, 517(1), 365, 2008
6 The role of atomic hydrogen in pre-epitaxial silicon substrate cleaning
Assmuth A, Stimpel-Lindner T, Senftleben O, Bayerstadler A, Sulima T, Baumgartner H, Eisele I
Applied Surface Science, 253(20), 8389, 2007
7 Doping profile dependence of the vertical impact ionization MOSFET's (I-MOS) performance
Abelein U, Assmuth A, Iskra P, Schindler M, Sulima T, Eisele I
Solid-State Electronics, 51(10), 1405, 2007
8 Conformal aluminum oxide coating of high aspect ratio structures using metalorganic chemical vapor deposition
Wiest F, Capodieci V, Blank O, Gutsche M, Schulze J, Eisele I, Matusche J, Schmidt UI
Thin Solid Films, 496(2), 240, 2006
9 Sub-50 nm high performance PDBFET with impact ionization
Born M, Abelein U, Bhuwalka KK, Schindler M, Schmidt M, Ludsteck A, Schulze J, Eisele I
Thin Solid Films, 508(1-2), 323, 2006
10 Optimization of thin, nitrogen-rich silicon oxynitrides grown by rapid thermal nitridation
Ludsteck A, Schulze J, Eisele I, Dietl W, Chung H, Nenyei Z, Bergmaier A, Dollinger G
Journal of the Electrochemical Society, 152(5), G334, 2005