검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
electron-beam focusing in 1 : 1 electron projection lithography system Sidorkin V, Moon CW, El Mostafa B, Lee SW, Yoo IK Journal of Vacuum Science & Technology B, 24(1), 224, 2006 |
| No. | Article |
|---|---|
| 1 |
electron-beam focusing in 1 : 1 electron projection lithography system Sidorkin V, Moon CW, El Mostafa B, Lee SW, Yoo IK Journal of Vacuum Science & Technology B, 24(1), 224, 2006 |