검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas Han D, Lee HC, Bang JY, Chung CW, Moon SY Current Applied Physics, 15(9), 1036, 2015 |
| 2 |
Effects of RF bias power on electron energy distribution function and plasma uniformity in inductively coupled argon plasma Lee HC, Bang JY, Chung CW Thin Solid Films, 519(20), 7009, 2011 |