검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The impact of etch-stop layer for borderless contacts on deep submicron CMOS device performance - a comparative study Liao H, Lee PS, Goh LNL, Liu H, Sudijono JL, Elgin Q, Sanford C Thin Solid Films, 462-63, 29, 2004 |
| No. | Article |
|---|---|
| 1 |
The impact of etch-stop layer for borderless contacts on deep submicron CMOS device performance - a comparative study Liao H, Lee PS, Goh LNL, Liu H, Sudijono JL, Elgin Q, Sanford C Thin Solid Films, 462-63, 29, 2004 |