검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Etch-Stop Behavior of Buried Layers Formed by Substoichiometric Nitrogen Ion-Implantation into Silicon Perezrodriguez A, Romanorodriguez A, Morante JR, Acero MC, Esteve J, Montserrat J, Elhassani A Journal of the Electrochemical Society, 143(3), 1026, 1996 |