검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Characterisation of an RF power splitter for multi-tile PECVD systems application Michna T, Ellingboe AR Current Applied Physics, 11(5), S9, 2011 |
| 2 |
Spatial structure of plasma potential oscillation and ion saturation current in VHF multi-tile electrode plasma source Ryan K, O'Farrell D, Ellingboe AR Current Applied Physics, 11(5), S114, 2011 |
| 3 |
Characterisation of thin film silicon films deposited by plasma enhanced chemical vapour deposition at 162 MHz, using a large area, scalable, multi-tile-electrode plasma source Monaghan E, Michna T, Gaman C, O'Farrel D, Ryan K, Adley D, Perova TS, Drews B, Jaskot M, Ellingboe AR Thin Solid Films, 519(20), 6884, 2011 |
| 4 |
Experiments and Modeling of a Helicon Source Molvik AW, Rognlien TD, Byers JA, Cohen RH, Ellingboe AR, Hooper EB, Mclean HS, Stallard BW, Vitello PA Journal of Vacuum Science & Technology A, 14(3), 984, 1996 |