검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Microcrystalline silicon thin film deposition from silicon tetrafluoride: Isolating role of ion energy using tailored voltage waveform plasmas Wang JK, Daineka D, Elyaakoubi M, Johnson EV Solar Energy Materials and Solar Cells, 190, 65, 2019 |
| 2 |
Effect of deposition conditions and dielectric plasma treatments on the electrical properties of microcrystalline silicon TFTs Kasouit S, Cabarrocas PRI, Vanderhaghen R, Bonassieux Y, Elyaakoubi M, French I, Rocha J, Vitoux B Thin Solid Films, 427(1-2), 67, 2003 |