검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Model for Expanding Sheaths and Surface Charging at Dielectric Surfaces During Plasma Source Ion-Implantation Emmert GA Journal of Vacuum Science & Technology B, 12(2), 880, 1994 |
| 2 |
2-Dimensional Fluid Modeling of Time-Dependent Plasma Sheath Hong MP, Emmert GA Journal of Vacuum Science & Technology B, 12(2), 889, 1994 |