검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Titanium-aluminum nitride film growth and related chemistry using dimethylamino-based precursors Endle JP, Sun YM, Silverman J, Nguyen N, Cowley AH, White JM, Ekerdt JG Thin Solid Films, 385(1-2), 66, 2001 |
| 2 |
Iridium precursor pyrolysis and oxidation reactions and direct liquid injection chemical vapor deposition of iridium films Endle JP, Sun YM, Nguyen N, Madhukar S, Hance RL, White JM, Ekerdt JG Thin Solid Films, 388(1-2), 126, 2001 |
| 3 |
Precursor chemistry and film growth with (methylcyclopentadienyl) (1,5-cyclooctadiene)iridium Sun YM, Yan XM, Mettlach N, Endle JP, Kirsch PD, Ekerdt JG, Madhukar S, Hance RL, White JM Journal of Vacuum Science & Technology A, 18(1), 10, 2000 |
| 4 |
Iridium film growth with iridium tris-acetylacetonate: oxygen and substrate effects Sun YM, Endle JP, Smith K, Whaley S, Mahaffy R, Ekerdt JG, White JM, Hance RL Thin Solid Films, 346(1-2), 100, 1999 |
| 5 |
X-ray photoelectron spectroscopy study of TiN films produced with tetrakis(dimethylamido)titanium and selected N-containing precursors on SiO2 Endle JP, Sun YM, White JM, Ekerdt JG Journal of Vacuum Science & Technology A, 16(3), 1262, 1998 |