검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Copper diffusion barrier properties of CVD boron carbo-nitride Engbrecht ER, Sun YM, Junker KH, White JM, Ekerdt JG Journal of Vacuum Science & Technology B, 23(2), 463, 2005 |
| 2 |
Chemical vapor deposition boron carbo-nitride deposited using dimethylamine borane with ammonia and ethylene Engbrecht ER, Sun YM, Junker KH, White JM, Ekerdt JG Journal of Vacuum Science & Technology A, 22(5), 2152, 2004 |
| 3 |
Ultra thin tungsten nitride film growth on dielectric surfaces Sun YM, Engbrecht ER, Bolom T, Cilino C, Sim JH, White JM, Ekerdt JG, Pfeifer K Thin Solid Films, 458(1-2), 251, 2004 |
| 4 |
Chemical vapor deposition growth and properties of TaCxNy Engbrecht ER, Sun YM, Smith S, Pfiefer K, Bennett J, White JM, Ekerdt JG Thin Solid Films, 418(2), 145, 2002 |
| 5 |
Low temperature chemical vapor deposition of tungsten carbide for copper diffusion barriers Sun YM, Lee SY, Lemonds AM, Engbrecht ER, Veldman S, Lozano J, White JM, Ekerdt JG, Emesh I, Pfeifer K Thin Solid Films, 397(1-2), 109, 2001 |