검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
산화구리 잔유물 제거를 위한 카르복시산 함유 반수계 용액의 세정특성 고천광, 이원규 Korean Chemical Engineering Research, 54(4), 548, 2016 |
| 2 |
Low temperature catalyst enhanced etch process with high etch rate selectivity for amorphous silicon based alloys over single-crystalline silicon based alloys Bauer M, Thomas SG Thin Solid Films, 520(8), 3139, 2012 |
| 3 |
The dry etching of a sol-gel deposited ZnO thin film in a high density BCl3/Ar plasma Woo JC, Um DS, Kim CI Thin Solid Films, 518(10), 2905, 2010 |
| 4 |
Etching control of benzocyclobutene in CF4/O-2 and SF6/O-2 plasmas with thick photoresist and titanium masks Liao EB, Teh WH, Teoh KW, Tay AAO, Feng HH, Kumar R Thin Solid Films, 504(1-2), 252, 2006 |