검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Etching Kinetics and Mechanisms of SiC Thin Films in F-, Cl- and Br-Based Plasma Chemistries Lee BJ, Efremov A, Lee J, Kwon KH Plasma Chemistry and Plasma Processing, 39(1), 325, 2019 |
| No. | Article |
|---|---|
| 1 |
Etching Kinetics and Mechanisms of SiC Thin Films in F-, Cl- and Br-Based Plasma Chemistries Lee BJ, Efremov A, Lee J, Kwon KH Plasma Chemistry and Plasma Processing, 39(1), 325, 2019 |