검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Dual-Plasma Reactor for Low-Temperature Deposition of Wide Band-Gap Silicon Alloys Etemadi R, Godet C, Perrin J, Drevillon B, Huc J, Parey JY, Rostaing JC, Coeuret F Journal of Vacuum Science & Technology A, 15(2), 320, 1997 |
| 2 |
Highly Homogeneous Silica Coatings for Optical and Protective Applications Deposited by PECVD at Room-Temperature in a Planar Uniform Distributed Electron-Cyclotron-Resonance Plasma Reactor Rostaing JC, Coeuret F, Pelletier J, Lagarde T, Etemadi R Thin Solid Films, 270(1-2), 49, 1995 |
| 3 |
Silicon-Based, Protective Transparent Multilayer Coatings Deposited at High-Rate on Optical Polymers by Dual-Mode MW/RF PECVD Rostaing JC, Coeuret F, Drevillon B, Etemadi R, Godet C, Huc J, Parey JY, Yakovlev VA Thin Solid Films, 236(1-2), 58, 1993 |