검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Analysis of the damage effect of femtosecond-laser irradiation on extreme ultraviolet Mo/Si multilayer coating Suman M, Monaco G, Zuppella P, Nicolosi P, Pelizzo MG, Ferrari F, Lucchini M, Nisoli M Thin Solid Films, 520(6), 2301, 2012 |
| 2 |
극자외선 리소그래피용 화학증폭형 레지스트 최재학, 노영창, 홍성권 Journal of the Korean Industrial and Engineering Chemistry, 17(2), 158, 2006 |