검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Direct plating of Cu on Pd plasma enhanced atomic layer deposition coated TaN barrier Lay NE, Eyck GAT, Duquette DJ, Lu TM Electrochemical and Solid State Letters, 10(1), D13, 2007 |
| No. | Article |
|---|---|
| 1 |
Direct plating of Cu on Pd plasma enhanced atomic layer deposition coated TaN barrier Lay NE, Eyck GAT, Duquette DJ, Lu TM Electrochemical and Solid State Letters, 10(1), D13, 2007 |