검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
TEM observation of grown-in defects in CZ and epitaxial silicon wafers detected with optical shallow defect analyzer Minowa K, Takeda K, Tomimatsu S, Umemura K Journal of Crystal Growth, 210(1-3), 15, 2000 |
| No. | Article |
|---|---|
| 1 |
TEM observation of grown-in defects in CZ and epitaxial silicon wafers detected with optical shallow defect analyzer Minowa K, Takeda K, Tomimatsu S, Umemura K Journal of Crystal Growth, 210(1-3), 15, 2000 |