화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Effects of the ultrasonic flexural vibration on the interaction between the abrasive particles; pad and sapphire substrate during chemical mechanical polishing (CMP)
Xu WH, Lu XC, Pan GS, Lei YZ, Luo JB
Applied Surface Science, 257(7), 2905, 2011
2 Ultrasonic flexural vibration assisted chemical mechanical polishing for sapphire substrate
Xu WH, Lu XC, Pan GS, Lei YZ, Luo JB
Applied Surface Science, 256(12), 3936, 2010
3 Analyses of vibration responses on nanoscale processing in a liquid using tapping-mode atomic force microscopy
Horng TL
Applied Surface Science, 256(1), 311, 2009
4 Investigation of convective heat transfer augmentation using acoustic streaming generated by ultrasonic vibrations
Hyun S, Lee DR, Loh BG
International Journal of Heat and Mass Transfer, 48(3-4), 703, 2005
5 Vibrational properties of wood along the grain
Obataya E, Ono T, Norimoto M
Journal of Materials Science, 35(12), 2993, 2000