화학공학소재연구정보센터
검색결과 : 11건
No. Article
1 Decomposition and Debromination of Monobromoacetic Acid by Radio Frequency Discharge in an Aqueous Solution
Wang L, Wang JX, Zhang SL, Liao WC
Plasma Chemistry and Plasma Processing, 37(6), 1463, 2017
2 Anodization of titanium in radio frequency oxygen discharge -Microstructure, kinetics & transport mechanism
Gottlicher M, Rohnke M, Kunz A, Thomas J, Henning RA, Leichtweiss T, Gemming T, Janek J
Solid State Ionics, 290, 130, 2016
3 Formation of silicon nanocrystal films at low temperature during capacitive radio frequency discharge transition to the high-current mode
Xu YM, Yu W, Jiang ZY, Li Y, Li HM, Feng HN
Thin Solid Films, 569, 52, 2014
4 Characterization of a high-frequency inductively coupled plasma source
Lee DS, Jun HS, Chang HY
Thin Solid Films, 506, 469, 2006
5 A Kinetic Study on the Conversion of Methane to Higher Hydrocarbons in a Radio-Frequency Discharge
Savinov SY, Lee H, Song HK, Na BK
Korean Journal of Chemical Engineering, 21(3), 601, 2004
6 Development of a large-area, multi-helicon rectangular plasma source for TFT-LCD processing
Kim YJ, Han SH, Hwang W, Hwang YS
Thin Solid Films, 435(1-2), 270, 2003
7 Cluster-suppressed plasma CVD for deposition of high quality a-Si : H films
Shiratani M, Koga K, Watanabe Y
Thin Solid Films, 427(1-2), 1, 2003
8 Optimization of plasma density and radial uniformity of a point-cusp magnetic field applied capacitive plasma
Wickramanayaka S, Nakagawa Y, Sago Y, Numasawa Y
Journal of Vacuum Science & Technology A, 18(3), 823, 2000
9 Large-diameter microwave plasma source excited by azimuthally symmetric surface waves
Tuda M, Ono K, Ootera H, Tsuchihashi M, Hanazaki M, Komemura T
Journal of Vacuum Science & Technology A, 18(3), 840, 2000
10 Diagnostics of the diamond depositing inductively coupled plasma by electrostatic probes and optical emission spectroscopy
Teii K
Journal of Vacuum Science & Technology A, 17(1), 138, 1999