검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Trap related dielectric absorption of HfSiO films in metal-insulator-semiconductor structures Kerber M, Fachmann C, Heitmann J, Kudelka S, Schroder U, Reisinger H Journal of Vacuum Science & Technology B, 27(1), 321, 2009 |
| No. | Article |
|---|---|
| 1 |
Trap related dielectric absorption of HfSiO films in metal-insulator-semiconductor structures Kerber M, Fachmann C, Heitmann J, Kudelka S, Schroder U, Reisinger H Journal of Vacuum Science & Technology B, 27(1), 321, 2009 |