검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Analytical comparison of atomic layer deposition of oxide films inside trench and hole nanostructures Fadeev AV, Rudenko KV Thin Solid Films, 672, 83, 2019 |
| No. | Article |
|---|---|
| 1 |
Analytical comparison of atomic layer deposition of oxide films inside trench and hole nanostructures Fadeev AV, Rudenko KV Thin Solid Films, 672, 83, 2019 |