검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The Influence of Precleaning Process on the Gate Oxide Film Fabricated by Electron-Cyclotron-Resonance Plasma Oxidation Chang KM, Li CH, Fahn FJ, Tsai JY, Yeh TH, Wang SW, Yang JY Journal of the Electrochemical Society, 144(1), 311, 1997 |