검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Dose-rate effects on the formation of ultra-shallow junctions with low-energy B+ and BF2+ ion implants Downey DF, Osburn CM, Cummings JJ, Daryanani S, Falk SW Thin Solid Films, 308-309, 562, 1997 |
| No. | Article |
|---|---|
| 1 |
Dose-rate effects on the formation of ultra-shallow junctions with low-energy B+ and BF2+ ion implants Downey DF, Osburn CM, Cummings JJ, Daryanani S, Falk SW Thin Solid Films, 308-309, 562, 1997 |