화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Picosecond laser micromachining prior to FIB milling for electronic microscopy sample preparation
Sikora A, Fares L, Adrian J, Goubier V, Delobbe A, Corbin A, Sentis M, Sarnet T
Applied Surface Science, 418, 607, 2017
2 Micromachining of semiconductor by femtosecond laser for integrated circuit defect analysis
Halbwax M, Sarnet T, Hermann J, Delaporte P, Sentis M, Fares L, Haller G
Applied Surface Science, 254(4), 911, 2007