검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Residual stress in silicon films deposited by LPCVD from disilane Temple-Boyer P, Scheid E, Faugere G, Rousset B Thin Solid Films, 310(1-2), 234, 1997 |
| No. | Article |
|---|---|
| 1 |
Residual stress in silicon films deposited by LPCVD from disilane Temple-Boyer P, Scheid E, Faugere G, Rousset B Thin Solid Films, 310(1-2), 234, 1997 |