검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Defect evolution after germanium preamorphization in silicon on insulator structures Fazzinia PF, Cristiano F, Dupre C, Claverie A, Ernst T, Gavelle M Journal of Vacuum Science & Technology B, 26(1), 342, 2008 |
| No. | Article |
|---|---|
| 1 |
Defect evolution after germanium preamorphization in silicon on insulator structures Fazzinia PF, Cristiano F, Dupre C, Claverie A, Ernst T, Gavelle M Journal of Vacuum Science & Technology B, 26(1), 342, 2008 |