검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Ballistic and molecular dynamics simulations of aluminum deposition in micro-trenches Kokkoris G, Brault P, Thomann AL, Caillard A, Samelor D, Boudouvis AG, Vahlas C Thin Solid Films, 536, 115, 2013 |
| 2 |
A new feature scale modem, and experiments of the hydrogen plasma assisted chemical vapor deposition of copper Lakshmanan SK, Gill WN Chemical Engineering Communications, 182, 99, 2000 |
| 3 |
Feature scale simulation of selective chemical vapor deposition process Yun JH, Rhee SW Thin Solid Films, 339(1-2), 270, 1999 |