화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 High quality SiC substrates for semiconductor devices: From research to industrial production
Muller SG, Brady MF, Brixius WH, Fechko G, Glass RC, Henshall D, Hobgood HM, Jenny JR, Leonard R, Malta D, Powell A, Tsvetkov VF, Allen S, Palmour J, Carter CH
Materials Science Forum, 389-3, 23, 2002
2 Status of large diameter SiC crystal growth for electronic and optical applications
Hobgood D, Brady M, Brixius W, Fechko G, Glass R, Henshall D, Jenny J, Leonard R, Malta D, Muller S, Tsvetkov V, Carter C
Materials Science Forum, 338-3, 3, 2000