검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Electron-beam nanolithography, acid diffusion, and chemical kinetics in SAL-601 Dobisz EA, Fedynyshyn TN, Ma D, Shirey LM, Bass R Journal of Vacuum Science & Technology B, 16(6), 3773, 1998 |
| No. | Article |
|---|---|
| 1 |
Electron-beam nanolithography, acid diffusion, and chemical kinetics in SAL-601 Dobisz EA, Fedynyshyn TN, Ma D, Shirey LM, Bass R Journal of Vacuum Science & Technology B, 16(6), 3773, 1998 |