검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Nano-laminate vs. direct deposition of high permittivity gadolinium scandate on silicon by high pressure sputtering Feijoo PC, Pampillon MA, Andres ES, Fierro JLG Thin Solid Films, 593, 62, 2015 |
| 2 |
Optimization of scandium oxide growth by high pressure sputtering on silicon Feijoo PC, Pampillon MA, San Andres E, Lucia ML Thin Solid Films, 526, 81, 2012 |
| 3 |
Electrical characterization of high-pressure reactive sputtered ScOx films on silicon Castan H, Duenas S, Gomez A, Garcia H, Bailon L, Feijoo PC, Toledano-Luque M, del Prado A, San Andres E, Lucia ML Thin Solid Films, 519(7), 2268, 2011 |
| 4 |
Nitridation of Si by N-2 Electron Cyclotron Resonance Plasma and Integration with ScOx Deposition Feijoo PC, del Prado A, Toledano-Luque M, San Andres E, Lucia ML Journal of the Electrochemical Society, 157(4), H430, 2010 |