검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of surface topography on oxide deposition rates using TEOS/O-2 chemistry Doyle JR, Feng GFJ Journal of Vacuum Science & Technology B, 17(5), 2147, 1999 |
| No. | Article |
|---|---|
| 1 |
Effects of surface topography on oxide deposition rates using TEOS/O-2 chemistry Doyle JR, Feng GFJ Journal of Vacuum Science & Technology B, 17(5), 2147, 1999 |