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| No. | Article |
|---|---|
| 1 |
Al2O3-SiO2 stack with enhanced reliability Lisiansky M, Fenigstein A, Heiman A, Raskin Y, Roizin Y, Bartholomew L, Owyang J, Gladkikh A, Brener R, Geppert I, Lyakin E, Meyler B, Shnieder Y, Yofis S, Eizenberg M Journal of Vacuum Science & Technology B, 27(1), 476, 2009 |