검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Atomically controlled growth of tungsten and tungsten nitride using sequential surface reactions Klaus JW, Ferro SJ, George SM Applied Surface Science, 162, 479, 2000 |
| 2 |
Atomic layer deposition of tungsten nitride films using sequential surface reactions Klaus JW, Ferro SJ, George SM Journal of the Electrochemical Society, 147(3), 1175, 2000 |
| 3 |
Atomic layer deposition of tungsten using sequential surface chemistry with a sacrificial stripping reaction Klaus JW, Ferro SJ, George SM Thin Solid Films, 360(1-2), 145, 2000 |