검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High dose rate effects in silicon by plasma source ion implantation Chun M, Kim B, Conrad JR, Matyi RJ, Malik SM, Fetherston P, Han S Journal of Vacuum Science & Technology B, 17(2), 863, 1999 |
| No. | Article |
|---|---|
| 1 |
High dose rate effects in silicon by plasma source ion implantation Chun M, Kim B, Conrad JR, Matyi RJ, Malik SM, Fetherston P, Han S Journal of Vacuum Science & Technology B, 17(2), 863, 1999 |