검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Technological solution for the automatic replacement of the catalytic filaments in HWCVD Nos O, Frigeri PA, Bertomeu J Thin Solid Films, 575, 30, 2015 |
| 2 |
Degradation of thin tungsten filaments at high temperature in HWCVD Frigeri PA, Nos O, Bertomeu J Thin Solid Films, 575, 34, 2015 |
| 3 |
Reversibility of silicidation of Ta filaments in HWCVD of thin film silicon van der Werf CHM, Li H, Verlaan V, Oliphant CJ, Bakker R, Houweling ZS, Schropp REI Thin Solid Films, 517(12), 3431, 2009 |
| 4 |
The development of resistive heating for the high temperature growth of alpha-SiC using a vertical CVD reactor Eshun E, Taylor C, Diagne NF, Griffin J, Spencer MG, Ferguson L, Gurary A, Stall R Materials Science Forum, 338-3, 157, 2000 |