검색결과 : 1건
No. | Article |
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1 |
A Less Critical Cleaning Procedure for Silicon-Wafer Using Diluted HF Dip and Boiling in Isopropyl-Alcohol as Final Steps Filho SG, Hasenack CM, Salay LC, Mertens P Journal of the Electrochemical Society, 142(3), 902, 1995 |