검색결과 : 4건
No. | Article |
---|---|
1 |
Robust multivariable estimation and control in an epitaxial thin film growth process under uncertainty Rasoulian S, Ricardez-Sandoval LA Journal of Process Control, 34, 70, 2015 |
2 |
Effect of deposition rate and a-Si precursor or cap layer on structure and magnetic properties of iron films on silicon substrates Gouralnik AS, Galkin NG, Ivanov VA, Cherednichenko AI, Plotnikov VS, Pustovalov EV Thin Solid Films, 519(24), 8520, 2011 |
3 |
Predictive control of surface mean slope and roughness in a thin film deposition process Zhang XY, Hu GS, Orkoulas G, Christofides PD Chemical Engineering Science, 65(16), 4720, 2010 |
4 |
Regulation of film thickness, surface roughness and porosity in thin film growth using deposition rate Hu GS, Orkoulas G, Christofides PD Chemical Engineering Science, 64(17), 3903, 2009 |