화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Robust multivariable estimation and control in an epitaxial thin film growth process under uncertainty
Rasoulian S, Ricardez-Sandoval LA
Journal of Process Control, 34, 70, 2015
2 Effect of deposition rate and a-Si precursor or cap layer on structure and magnetic properties of iron films on silicon substrates
Gouralnik AS, Galkin NG, Ivanov VA, Cherednichenko AI, Plotnikov VS, Pustovalov EV
Thin Solid Films, 519(24), 8520, 2011
3 Predictive control of surface mean slope and roughness in a thin film deposition process
Zhang XY, Hu GS, Orkoulas G, Christofides PD
Chemical Engineering Science, 65(16), 4720, 2010
4 Regulation of film thickness, surface roughness and porosity in thin film growth using deposition rate
Hu GS, Orkoulas G, Christofides PD
Chemical Engineering Science, 64(17), 3903, 2009