검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Compositional Characterization of Very Thin SiO2/Si3N4/SiO2 Stacked Films by X-Ray Photoemission Spectroscopy and Time-of-Flight Secondary-Ion Mass-Spectroscopy Techniques Santucci S, Lozzi L, Ottaviano L, Passacantando M, Picozzi P, Moccia G, Alfonsetti R, Digiacomo A, Fiorani P Journal of Vacuum Science & Technology A, 15(3), 905, 1997 |