검색결과 : 2건
No. | Article |
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1 |
Fabrication and characterization of a capacitive micromachined shunt switch Firebaugh SL, Charles HK, Edwards RL, Keeney AC, Wilderson SF Journal of Vacuum Science & Technology A, 22(4), 1383, 2004 |
2 |
Micromachined Reactors for Catalytic Partial Oxidation Reactions Srinivasan R, Hsing IM, Berger PE, Jensen KF, Firebaugh SL, Schmidt MA, Harold MP, Lerou JJ, Ryley JF AIChE Journal, 43(11), 3059, 1997 |