화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Surface quality of tribochemically polished silicon nitride
Hah SR, Burk CB, Fischer TE
Journal of the Electrochemical Society, 146(4), 1505, 1999
2 Tribochemical polishing of silicon nitride
Hah SR, Fischer TE
Journal of the Electrochemical Society, 145(5), 1708, 1998
3 Tribochemical reactions of silicon : An in situ infrared spectroscopy characterization
Muratov VA, Olsen JE, Gallois BM, Fischer TE, Bean JC
Journal of the Electrochemical Society, 145(7), 2465, 1998
4 Tribological properties of diamond-like carbon films deposited by negative carbon ion beam
Sohn MH, Ahn YO, Ko YW, Hah SR, Fischer TE, Kim SI
Journal of Vacuum Science & Technology A, 16(6), 3554, 1998